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The Next-Generation
of Optical Microscopy
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site content copyright ©2000 TriTek Corp.
Material Alignment
Tools
Perform critical layer-to-layer alignment using
TriTek's x, y, theta positioning system. A video microscope is
employed to image the area of interest of the overlaid
structure. A patent pending subassembly provides the capability
to move one layer relative to another 5mm in increments of 1.6
micrometers. The computer provides the movement through three
stepper motor controlled positioners pushing against three
pneumatic pushers. Computer-controlled, pneumatically operated
pop-up pins are available for independent registration of each
layer.
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Augment your manual alignment tools with a
quad-video imaging system. This retrofittable assembly can be
installed on your tools to overhang your alignment fixture and
provide the simultaneous image of each quadrant of your
products. A single set of adjustments to your overlaid products
will result in one-pass alignments. The product includes four
zoom microscopes, coaxial illumination system, four CCD cameras,
4:1 video multiplexor, video monitor and a front-to-back
precision stage with 300mm (12") of travel with precision
hydraulic stops. |
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